Prevent cross contamination and surface oxidation

• Control wafer in FOUP during process by Load Port N2 purge function

Superior stable placement

• Control nozzle upward timing
• Compatibility of non-N2 purge applicable FOUPs
• Interference avoidance with kinematic pin at FOUP placement
• Adjustment function of nozzle pressure
• Nozzle up and down position checking function (sensor)

N2 purging on carrier base

• Adapted FOUP Type: A-300, SPECTRA (4 Port Purge Type: 2 inlet, 2 outlet ports)
• Applicable to other N2 purge type FOUPs

Monitoring N2 gas flow rate by flow meter

Controlling N2 gas flow rate by MFC

Preventing contamination through purge port

• Gas-Filter at inlet port side
• Adhesion to grommet of FOUP side